Study of Iridium (Ir) Thin Films Deposited on to SiO2 Substrates
نویسندگان: ثبت نشده
چکیده مقاله:
Very smooth thin films of iridium have been deposited on super polished fused silica (SiO2) substrates using dc magnetron sputtering in argon plasma. The influence of deposition process parameters on film micro roughness has been investigated. In addition, film optical constants have been determined using variable angle spectroscopic ellipsometery, over the spectra range from vacuum ultraviolet to middle infrared (140 nm-35 ?m). Also the surface roughnesses were measured by atomic force microscopy (AFM).
منابع مشابه
study of iridium (ir) thin films deposited on to sio2 substrates
very smooth thin films of iridium have been deposited on super polished fused silica (sio2) substrates using dc magnetron sputtering in argon plasma. the influence of deposition process parameters on film micro roughness has been investigated. in addition, film optical constants have been determined using variable angle spectroscopic ellipsometery, over the spectra range from vacuum ultraviolet...
متن کاملA Study of ZnO Buffer Layer Effect on Physical Properties of ITO Thin Films Deposited on Different Substrates
The improvement of the physical properties of Indium Tin Oxide (ITO) layers is quite advantageous in photovoltaic applications. In this study the ITO film is deposited by RF sputtering onto p-type crystalline silicon (c-Si) with (100) orientation, multicrystalline silicon (mc-Si), and glass substrates coated with ZnO and annealed in vacuum furnace at 400°C. Electrical, optical, structural a...
متن کاملSpectroscopic Ellipsometry Study of Co3O4 Thin Films Deposited on Several Metal Substrates
Spectroscopic ellipsometry and atomic force microscope techniques were employed to analyze optical properties, microstructure and thickness of cobalt oxide thin films deposited on metal substrates by the sol-gel dipping method. The ellipsometric data were conveniently fitted, assuming a stratified structure for the deposited film, which consists of a sublayer native oxide that was coated with a...
متن کاملa study of zno buffer layer effect on physical properties of ito thin films deposited on different substrates
the improvement of the physical properties of indium tin oxide (ito) layers is quite advantageous in photovoltaic applications. in this study the ito film is deposited by rf sputtering onto p-type crystalline silicon (c-si) with (100) orientation, multicrystalline silicon (mc-si), and glass substrates coated with zno and annealed in vacuum furnace at 400°c. electrical, optical, structural and m...
متن کاملEnhanced methanol sensing performance of oblique deposited WO3 thin films
Methanol (CH3OH) is a colorless liquid with a mild odor. The wide ranges of applications, toxicity and clinical implications of methanol have made necessary to develop reliable and high-performance methanol sensors. In this paper, WO3 thin films were deposited on SiO2/Si substrates by e-beam evaporation technique under normal and oblique angles and then post-annealed at 500 °C with a flow of ox...
متن کاملElectromechanical Coupling Factor of Thickness - Shear Mode of the Piezoelectric Thin Films Deposited on Substrates
An experiment method for characterizing piezoelectric film, which is deposited on a substrate plate to form a thickness-shear wave High-overmode Bulk Acoustic Resonator (HBAR), will be presented in this paper. Based on the parallel and series resonant frequency spectra of the HBAR, the electromechanical coupling factor of the piezoelectric film operating in thickness-shear mode can be evaluated...
متن کاملمنابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ذخیره در منابع من قبلا به منابع من ذحیره شده{@ msg_add @}
عنوان ژورنال
دوره 16 شماره 2
صفحات -
تاریخ انتشار 2005-06-01
با دنبال کردن یک ژورنال هنگامی که شماره جدید این ژورنال منتشر می شود به شما از طریق ایمیل اطلاع داده می شود.
میزبانی شده توسط پلتفرم ابری doprax.com
copyright © 2015-2023